Research Area

Surface Technology

Stylus Instrument / Profilometer PGI1200

Examples of use:

  • Examination of the surface topography even on slightly curved surfaces
  • 3D-mappings for the determination of waviness and roughness
  • Creation and evaluation of surface profiles of workpieces


Device configuration:

Horizontal Performance

  • travers length - X Max / Min: 200mm / 0.1mm (7.9in / 0.004in)
  • measuring speeds: 0.1mm/s, 0.25mm/s, 0.5mm/s & 0.1mm/s (0.004in/s, 0.01in/s, 0.02in/s & 0.04in/s)
  • traverse speeds: 0.1-10mm/s (0.004-0.39in/s)
  • data sampling interval in X: 0.125µm over 200mm length (5µin over 7.9in length)
  • maximum number of data points: 1,600,000
  • straightness error [Pt]: 125nm/200mm (10µin/7.9in)
  • datum correction: standard


Vertical Performance

  • nominal measuring range (Z): 12.55mm (60mm stylus arm)  (0.49in [2.36in])
                                                               25mm (120mm stylus arm) (0.98in [4.72in])
  • resolution (Z) ³ : 0.8nm @ 12.55mm range (0.03µin @ 0.49in range)
  • range to resolution ratio ³ : 15,625,000 : 1
  • stylus arm length, tip size, force: 66mm arm, 2µm radius conisphere diamond styling, 1mN force, 122mm arm, 0.5mm radius ball, 20mN force
  • Z axis nonlinearity: (0.07 + 0.03 Z [mm]) µm (3 + 30 Z [inches]) µin - after calibration 4
  • repeatability of Z axis indication (flat surface - diamond stylus): 0.15µm (6.1µin) 5
  • repeatability of Z axis indication (curved surface - diamond stylus): 0.16µm (6.3µin) 5
  • repeatability of Z axis indication (curved surface - ball stylus): 0.12µm (4.5µin) 5

Overview of the Devices

Manufacturer:

Taylor Hobson

Model:

Stylus Instrument / Profilometer PGI1200

 

Dr. Andreas Pfuch


Surface Technology
Team Leader
Physical Technologies

e-mail
Phone: +49 3641 282554