Examples of use:

• Analysis of the surface topography on surfaces
• Determination of layer thicknesses on prepared edges > 10 nm
• 3D-mappings for the determination of waviness and roughness
• Creation and evaluation of surface profiles of workpieces

Device configuration:

• Measuring range vertical: 0 – 1 200 µm
• Max. scan length: 55 mm (200 mm with stitching)
• X-Y travel: 150 x 178 mm²
• Force range: 0.03 - 10 mg
• Sample rate: up to 2000 Hz
• Number of data points: up to 120 000 per profile
• Step height accuracy < 0.6 nm
• Stylus measuring seats 2 µm radius/ 60 °
• Sample stage/ vacuum chuck with 200 mm diameter
• Automated measurements at up to 99 positions