Research Area

Surface Technology

Stylus Instrument / Profilometer Alpha-Step D-600

Examples of use:

  • Analysis of the surface topography on surfaces
  • Determination of layer thicknesses on prepared edges > 10 nm
  • 3D-mappings for the determination of waviness and roughness
  • Creation and evaluation of surface profiles of workpieces


Device configuration:

  • Measuring range vertical: 0 – 1 200 µm
  • Max. scan length: 55 mm (200 mm with stitching)
  • X-Y travel: 150 x 178 mm²
  • Force range: 0.03 - 10 mg
  • Sample rate: up to 2000 Hz
  • Number of data points: up to 120 000 per profile
  • Step height accuracy < 0.6 nm
  • Stylus measuring seats 2 µm radius/ 60 °
  • Sample stage/ vacuum chuck with 200 mm diameter
  • Automated measurements at up to 99 positions

Overview of the Devices

Manufacturer:

KLA Tencor

Model:

Stylus Instrument / Profilometer Alpha-Step D-600

 

Ronny Koecher

Surface Technology

e-mail
Phone: +49 3641 2825436