Examples of use:

• qualitative and quantitative micro range analysis of high vacuum stable samples
• Information depth 1-5 µm (depending on sample)
• Analysis of
  • Layers, layer structures
  • Material defects
  • Corrosion products
  • Inclusions

Device configuration:

• SDD detector with 100 mm² area
• Detection of all elements from OZ 4 (Be)
• Qualitative and quantitative element analysis
• Point and area analyses, line scans, element distribution images
• Preparation technique: Preparation technique: carbon vaporization system