Research Area

Surface Technology

EDX-Analysis

Examples of use:

  • qualitative and quantitative micro range analysis of high vacuum stable samples
  • Information depth 3-5 µm
  • Analysis of
    • Layers, layer structures
    • Material defects
    • Corrosion products
    • Inclusions



Device configuration:

  • With SDD detector
  • Detection of all elements from OZ 5 (boron)
  • Point and area analyses, line scans, element distribution images
  • Only in combination with the scanning electron microscope
  • Preparation technique
    • Carbon vaporisation plant

Overview of the Devices

Manufacturer:

Bruker

Model:

N/A

 

Dr. Martina Schweder

Surface Technology

e-mail
Phone: +49 3641 282526