Research Area

Surface Technology

Jet Plasmas

In the department of surface technology, atmospheric jet plasma systems from various manufacturers are available. In addition to pure plasma activation, these can also be used to produce functional coatings. The necessary dosing technology (vaporizer, atomizer) is available for the production of coatings. Different systems for sample handling (rotation, x-y-traversing units, table-top robots) allow a flexible processing of the samples or workpieces.

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Jet plasma systems:

  • PlasmaBlaster MEF - TIGRES GmbH, up to 500W
  • MEF Multi-Blaster - TIGRES GmbH, 14 nozzles on 10 cm, treatment width, up to 2800 W
  • Plasma Blaster Mini-MEF - TIGRES GmbH, up to 300 W
  • PFW 10 - Plasmatreat GmbH, Universal OpenAir Plasma Jet, up to 1000 W
  • Piezobrush PZ2 - relyon plasma GmbH, up to 18 W
  • KinPen 11 - neoplas tools GmbH, up to 10 W

 

Dosing systems:

  • MFC controlled Precursor Dosing System STS10 from Sura Instruments
  • Ismatec hose pump and patented LARS atomizer unit for dosing liquid precursors

 

Sample handling:

  • Traversing units from PASIM
  • UR5 tabletop robot from Universal Robots

 


Overview of the Devices

Dr. Andreas Pfuch


Surface Technology
Team Leader
Physical Technologies

e-mail
Phone: +49 3641 282554