Research Area

Surface Technology

Spectral Ellipsometer SE850

Examples of use:

  • Characterization of thin films on smooth surfaces
  • Measurement of mixed oxide layers or layer stacks (e.g. SiO2-TiO2-SiO2-SiO2-TiO2...)
  • Observation of structural changes in layers due to external influences (e.g. tempering)

Device configuration:

  • Spectral ellipsometer SE850
  • Wavelength range: 350 - 2300 nm
  • Step scan analyser measuring principle
  • Simultaneous measurement in UV-Vis and NIR range
  • Microspot option with focus diameter of approx. 200µm
  • Software: SpectraRay II
  • Determination of the optical properties (layer thicknesses, refractive indices, absorption coefficients) of layers or layer stacks
  • Numerous models for the simulation of the measured data
  • Determination of roughness or interfaces (Effective Medium Approximation)
  • Gradients of the refractive index (linear, exponential, Gauss)

Overview of the Devices


Sentech Instruments GmbH


Spectral ellipsometer SE850


Dr. Andreas Pfuch

Surface Technology
Team Leader
Physical Technologies

Phone: +49 3641 282554