Research Area

Surface Technology

Plasma Polymerization

Plasma polymerization under vacuum conditions is an established method for thin film deposition. INNOVENT has a system for plasma coating (Plasma Technology UK Ltd.) of planar workpieces (up to approx. 20 cm diameter). The system is characterized by a capacitive electrode arrangement with a 13.56 MHz high voltage supply and is mainly used for the production of thin silicon dioxide layers.


Overview of the Devices

Manufacturer:

Plasma Technology UK Ltd

 

Dr. Andreas Pfuch


Surface Technology
Team Leader
Physical Technologies

e-mail
Phone: +49 3641 282554