Research Area

Surface Technology

Plasma Polymerization

Plasma polymerization under vacuum conditions is an established method for thin film deposition. INNOVENT has a system for plasma coating (Plasma Technology UK Ltd.) of planar workpieces (up to approx. 20 cm diameter). The system is characterized by a capacitive electrode arrangement with a 13.56 MHz high voltage supply and is mainly used for the production of thin silicon dioxide layers.

Overview of the Devices


Plasma Technology UK Ltd


Dr. Andreas Pfuch

Surface Technology
Team Leader
Physical Technologies

Phone: +49 3641 282554