Examples of use:

• Contactless examination of the surface topography on surfaces
  • Suitable for sensitive layers
• Determination of layer thicknesses on prepared edges > 10 nm
• 3D-mappings for the determination of waviness and roughness
• Creation and evaluation of surface profiles of workpieces

Device configuration:

• High power LED light source (505 nm)

Vertical fine adjuster:

• Max. measuring path: 350 µm
• Min. measurement noise: 1 nm (100x magnification)

X/Y-precision measuring table (motorized):

• Traverse path (x-y): 50 x 50 mm².
• Supporting surface: 150 x 150 mm².
• Resolution (x-y): 0.3 µm
• Load capacity: 10 kg

Z-axis (motorized):

• Travel distance (z): 70 mm
• Max. vertical measuring range: 10 mm
• Resolution (z): 0.02 µm
• Max. sample height: 70 mm
• Magnifications: 10x, 20x, 50x, 100x
• Min. measuring field: 160 x 160 µm²

HD stitching:

• Automatic capture and combination of up to 500 single images into one large total measuring field.

Shape Tracing:

• Fast and robust measuring strategy with surface tracking for wavy samples