Research Area

Surface Technology

Confocal Microscope - MarSurf CM explorer

Examples of use:

  • Contactless examination of the surface topography on surfaces
    • Suitable for sensitive layers
  • Determination of layer thicknesses on prepared edges > 10 nm
  • 3D-mappings for the determination of waviness and roughness
  • Creation and evaluation of surface profiles of workpieces

 

Device configuration:

  • High power LED light source (505 nm)

 

Vertical fine adjuster:

  • Max. measuring path: 350 µm
  • Min. measurement noise: 1 nm (100x magnification)

 

X/Y-precision measuring table (motorized):

  • Traverse path (x-y): 50 x 50 mm².
  • Supporting surface: 150 x 150 mm².
  • Resolution (x-y): 0.3 µm
  • Load capacity: 10 kg

 

Z-axis (motorized):

  • Travel distance (z): 70 mm
  • Max. vertical measuring range: 10 mm
  • Resolution (z): 0.02 µm
  • Max. sample height: 70 mm
  • Magnifications: 10x, 20x, 50x, 100x
  • Min. measuring field: 160 x 160 µm²

 

HD stitching:

  • Automatic capture and combination of up to 500 single images into one large total measuring field.

 

Shape Tracing:

  • Fast and robust measuring strategy with surface tracking for wavy samples

 


Overview of the Devices

Manufacturer:

MAHR GmbH

Model:

MarSurf CM explorer

 

Ronny Koecher

Surface Technology

e-mail
Phone: +49 3641 2825436