Research Area

Surface Technology

Optical Emission Spectrometer

Examples of use:

  • Spectral analysis of plasmas, flames, light signals
  • Determination of emitting species in flames and plasmas (process gases, precursors)
  • Plasma diagnostics in APCVD processes
  • Monitoring of plasma and flame processes

 

Device configuration:

Plasus EMICON MC

  • wavelength range: 200-1100 nm
  • spectral resolution: app. 1,5 nm
  • channels: 8
  • integration time:  1 ms – 10 s
     

Plasus EMICON HR

  • wavelength range: 200 – 860 nm
  • spectral resolution: 0,2 – 0,3 nm
  • channels: 1
  • integration time: 1 ms – 10 s

Overview of the Devices

Manufacturer:

PLASUS GmbH

Model:

Plasus EMICON MC und Plasus EMICON HR

Oliver Beier

Surface Technology
Team Leader
AP Application Lab

e-mail
Phone: +49 3641 282517