Anwendungsbeispiele:

• Untersuchung der Oberflächentopografie auch auf leicht gekrümmten Oberflächen
• 3D-Mappings zur Bestimmung von Welligkeiten und Rauheiten
• Erstellung und Auswertung von Oberflächenprofilen von Werkstücken

Gerätekonfiguration:

Horizontal Performance

• travers length - X Max / Min: 200mm / 0.1mm (7.9in / 0.004in)
• measuring speeds: 0.1mm/s, 0.25mm/s, 0.5mm/s & 0.1mm/s (0.004in/s, 0.01in/s, 0.02in/s & 0.04in/s)
• traverse speeds: 0.1-10mm/s (0.004-0.39in/s)
• data sampling interval in X: 0.125µm over 200mm length (5µin over 7.9in length)
• maximum number of data points: 1,600,000
• straightness error [Pt]: 125nm/200mm (10µin/7.9in)
• datum correction: standard

Vertical Performance

• nominal measuring range (Z): 12.55mm (60mm stylus arm)  (0.49in [2.36in])
                                                             25mm (120mm stylus arm) (0.98in [4.72in])
• resolution (Z) ³ : 0.8nm @ 12.55mm range (0.03µin @ 0.49in range)
• range to resolution ratio ³ : 15,625,000 : 1
• stylus arm length, tip size, force: 66mm arm, 2µm radius conisphere diamond styling, 1mN force, 122mm arm, 0.5mm radius ball, 20mN force
• Z axis nonlinearity: (0.07 + 0.03 Z [mm]) µm (3 + 30 Z [inches]) µin - after calibration ⁴
• repeatability of Z axis indication (flat surface - diamond stylus): 0.15µm (6.1µin) ⁵
• repeatability of Z axis indication (curved surface - diamond stylus): 0.16µm (6.3µin) ⁵
• repeatability of Z axis indication (curved surface - ball stylus): 0.12µm (4.5µin) ⁵