Research Area

Surface Technology

Single Jet Plasma Systems

Atmospheric Pressure Plasma Jets APPJ are very comfortable tools to locally modify a workpiece surface at ambient pressure conditions. Mostly the plasma discharge itself burns within a symmetric plasma nozzle and will be blowed out by the used gas pressure. Most of the commercially available plasma systems work with pressurized air.

Applying special precursor substances, these plasmas can be used not only for simple plasma pretreatment but also for coatings processes, too. INNOVENT has been working on this topic for more than ten years and today we are able to apply silicon, titanium or tin oxide thin films. At the moment, our research is focused on the development and application of composite coatings consisting of a silicon oxide matrix with additionally embedded functional nanoparticles.

The inline-capability of the APPJ process makes it very interesting for a lot of industrial applications.



Examples of possible applications:

  • Plasma cleaning before gluing or printing
  • Hydrophilic or hydrophobic coatings
  • Adhesion promoting coatings as well as antiadherent coatings
  • Thin films with embedded fluorescent markers
  • Antimicrobial and fungicid coatings
  • Corrosion protection layers
  • Photocatalytically active coatings based on TiOx
  • Sensor coatings based on SnOx
  • Highly photocatalytically active layers based on TiOx



O. Beier, A. Pfuch, K. Horn, J. Weisser, M. Schnabelrauch, A. Schimanski; „Low Temperature Deposition of Antibacterially Active Silicon Oxide Layers Containing Silver Nanoparticles, Prepared by Atmospheric Pressure Plasma Chemical Vapour Deposition“ Plasma Processes and Polymers, Volume 10, Issue 1, 2013, pages 77–87

S. Spange, A. Pfuch, C. Wiegand, O. Beier, U.C. Hipler, B. Grünler; „Atmospheric pressure plasma CVD as a tool to functionalise wound dressings”, Journal of Materials Science: Materials in Medicine (2015) 26 (2), 76, DOI 10.1007/s10856-015-5417-3

C. Wiegand, S. Fink, U.-C. Hipler, O. Beier, K. Horn, A. Pfuch, A. Schimanski, B. Grünler; „Cold atmospheric pressure plasmas exhibit antimicrobial properties against critical bacteria and yeast species”, Journal of Wound Care 26 (2017) 462; DOI

S. Gerullis, A. Pfuch, S. Spange, F. Kettner, K. Plaschkies, B. Küzün, P. V. Kosmachev, G. G. Volokitin, B. Grünler; “Thin antimicrobial silver, copper or zinc containing SiOx films on wood polymer composites (WPC) applied by atmospheric pressure plasma chemical vapour deposition (APCVD) and sol-gel technology”, online available, European Journal of Wood and Wood Products, DOI 10.1007/s00107-017-1220-9

S. Gerullis, L. Pohle, A. Pfuch, O. Beier, B.S.M. Kretzschmar, M. Raugust, E. Rädlein, B. Grünler, A. Schimanski; „Structural, electrical and optical properties of SnOx films deposited by use of atmospheric pressure plasma jet“ Thin Solid Films 649 (2018) 97–105

Dr. Andreas Pfuch

Surface Technology
Team Leader
Physical Technologies

Phone: +49 3641 282554