CCVD - Combustion Chemical Vapour Deposition
In the process of Combustion Chemical Vapor Deposition, often also referred to as flame pyrolysis, special precursors are introduced into a fuel gas-air mixture and chemically converted in the flames of a burner specially optimized for the coating (pyrolysis). Propane or natural gas (methane) as well as air are used as standard and mixed in an approximately stoichiometric ratio. In principle, other fuel gases (e.g. hydrogen or acetylene) and a higher proportion of oxygen than in normal air are also possible in order to control the flame temperature and thus the chemical reactivity of the flames.
Depending on the substrate material and the aim of surface functionalization, the type and state of the precursor, the fuel gas mixture and type of burner as well as a number of process parameters such as the distance to the substrate and its speed relative to the burner, the precursor flow and the number of burner runs, can be adjusted and controlled.
Application | Functional surfaces of CCVD-layers | Examples |
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Selected literature:
I. Zunke, B.S.M. Kretzschmar, A. Heft, J. Schmidt, A. Schimanski, B. Grünler
Flame pyrolysis – a cost effective approach for depositing thin functional coatings at atmospheric pressure
Handbook of MODERN COATINGS TECHNOLOGIES – Fabrication Methods and Functional Properties 2021 139ff
A. Preuß, R. Ehnert, B.S.M. Kretzschmar, J. Noll, A. Heft, B. Grünler, H. Lang
Gold(I) Carboxylates and [Au(C(NH2)2(=S))2][SO3Me] for the Deposition of Gold and Gold-doped SiOx Materials by the Atmospheric Pressure Combustion CVD Process.
Inorganica Chimica Acta 502 2020 119355
B.S.M. Kretzschmar, P. Bergelt, D. Göhler, F. Firmbach, R. Köcher, A. Heft, M. Stintz, B. Grünler
Aerosol Science and Technology 54 2020 1124-1134
B.S.M. Kretzschmar, E. Wendler, A. Heft, R. Köcher, C. Voigt, C. Ronning, B. Grünler, E. Rädlein
Comprehensive porosity determination of combustion-deposited SiOx thin films and correlation with FTIR signal
Surface and Coatings Technology 375 2019 256-265
B.S.M. Kretzschmar, K. Assim, A. Preuß, A. Heft, M. Korb, M. Pügner, T. Lampke, B. Grünler, H. Lang
Cobalt and manganese carboxylates for metal oxide thin film deposition by applying the atmospheric pressure combustion chemical vapour deposition process
RSC Advances 8 (2018) 15632
I. Zunke, D. Kloß, A. Heft, J. Schmidt, B. Grünler
Replacing the wet chemical activation with an atmospheric pressure technique in electroless deposition of Prussian blue
Surface and Coatings Technology 289 (2016); S. 186-193
I. Zunke, P. Rüffer, T. Tölke, A. Heft, B. Grünler, A. Schimanski
Deposition of thin functional coatings at atmospheric pressure using combustion chemical vapour deposition
Combustion: Types of Reactions, Fundamental Processes and Advanced Technologies; Nova Science Publishers; New York; 2014; S. 121-168
I. Zunke, A. Heft, P. Schäfer, F. Haidu, D. Lehmann, B. Grünler, A. Schimanski, D. R. T. Zahn
Conductive zinc oxide thin film coatings by combustion chemical vapour deposition at atmospheric pressure
Thin Solid Films 532 (2013); S. 50-55
T. Palenta, A. Kriltz, P. Rüffer, A. Heft, B. Grünler
Characterization of corrosion effects on float glass coated by CCVD
Surface & Coatings Technology 232 (2013); S. 742-746
R. Zimmermann, A. Pfuch, K. Horn, J. Weisser, A. Heft, M. Röder, R. Linke, M. Schnabelrauch, A. Schimanski
An approach to create silver containing antibacterial coatings by use of Atmospheric Pressure Plasma Chemical Vapor Deposition (APCVD) and Combustion Chemical Vapor Deposition (CCVD) in an economic way
Plasma Processes and Polymers 8 (2011); S. 295-304
Dr. Andreas Pfuch
Surface Technology
Team Leader
Physical Technologies
e-mail
Phone: +49 3641 282554