X-ray Photoelectron Spectroscopy - XPS / Electron Spectroscopy for Chemical Analysis - ESCA
X-ray photoelectron spectrometer: Theta Probe (Thermo VG Scientific)
- Monochromatic X-ray source Al Kα: 1468.68 eV
- Variable X-ray spot size:
400 - 15 µm diameter - Hemispherical analyzer
- Quadrupole lens (angle integrated and angle resolved spectroscopy)
- 2D-detector (multiple energy and angle channels available)
- Flood gun (low energy electrons: 0.5 - 14 eV)
- Ion gun (0.1 - 5.0 KeV)
- Optical sample positioning system
Surface analytical method based on Photoelectric Effect
- qualitative and quantitative elemental analysis (Z ≥ 3)
- Identification of chemical states (oxidation state)
- Detection limits dependent on element: 0.1-1 Atom-%
- Information depth approx. 10 nm
- Small area XPS 400-15µm diameter
- Chemical state mapping
- Line scans
- Depth profiles: non-destructive up to 10 nm by angle resolved spectroscopy, destructive up to several 100 nm by ion etching
Sample requirements
- UHV-compatible
- Solids (including powders), electrical conductive and insulating
- max. 70x70x25 mm3 for spectroscopy
- max. 28 mm diameter or diagonal length and 20 mm height for depth profiling by ion etching