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Diffraction model Rigorous Coupled Wave Analysis (RCWA)

Our home-developed commercial software UNIGIT provides a wide application area for the simulation of diffration behaviour of microstructured surfaces. It focuses on the calculation of reflected and transmitted diffraction efficiencies at a grating that can be corrugated by many layers and interfaces. Furthermore, polarisation dependecies and phase lenghts for discrete diffraction orders as well as evanescent waves in the near field are to be determined. For more details refer to the descriptions on website www.unigit.com. The RCWA analysis will be applicable in the case of evanescent fields that considerably shape the scattering behaviour of the probe (see model-based light scattering analysis). In collaboration with the Fraunhofer IOF Jena the RCWA model have been extended on the radiation from multilayer structures with gratings. Following figures shows such examples with radiation by electric activated dipoles in the third layer.

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Plane layer structure with radialsymmetric radiation characteristics

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Grid-arranged dipoles with radiation characteristics of higher numerical aperture


contact
Mr. Dr. A. Hertzsch
phone 03641 282589

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