INNOVENT - Technologieentwicklung Jena


 

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Equipment

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Top seeded solution growth system TSSG-120

  • Resistively heated vertical 3-zone tube furnace
  • Operating temperature: ranging from room temperature to a maximum of 1300°C
  • Normal pressure and/or process gas flow (e.g. N2, Ar, O2)
  • Crystal translation unit: min 0.001 mm/h
  • Crystal rotation unit: +/- 50 rpm (programmable change of rotational direction)
  • Crucible rotation unit with programmable ACRT technique
  • Crucible diameter: max 70 mm
  • Full automatic crystal growth process controller / process visualization
  • crystal weighting system



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1 inch and 3 inch LPE deposition systems 

  • Resistively heated vertical 3-zone tube furnaces
  • Operating temperature: ranging from room temperature to a maximum of 1300°C
  • Normal pressure and/or process gas flow (e.g. N2, Ar, O2)
  • Substrate rotation unit: +/- 200 rpm (programmable change of rotational direction)
  • Spin-off rotation unit: 1200 rpm
  • Crucible rotation unit with programmable ACRT technique
  • Crucible diameter: max 110 mm
  • Full automatic crystal growth process controller / process visualization

contact:     Mr. Dr. C. Dubs     phone:  03641282564                                                                                 back

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